Friday, March 26, 2010

Problem p5000etch SNF 2010-03-26 04:17:02: Ch. C is in fault mode (red)

Ch. C has been in fault mode with a stopped process all day. The turbo pump appears to be off and the pressure in the chamber is too high to be measured by the gauge it seems. Since I didn't see any report on Coral I didn't try and do anything about it. ( I was using Ch. B)

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