Cr etchant: etching rate?

 

Dear Labmembers,

 

What is the etching rate of Cr etchant in snf? I need to etch 2nm buffer Cr layer. Lateral etching is not a big issue. How much time will be enough for that?

Thanks

 

Kyunghoae

 

 

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Kyung-Hoae Koo

PhD candidate

Stanford University

EE department