Removed load lock isolation valve and lubed, that fixed the
vibration problem. Adjusted clamping force and release
clamp position sensor. Set the robot extension speed
from 4 to 10 help compensate on the virbration during
extension load and unload sequence, currently running
cha B jim-ox recipe and so far wafer on blade pocket is
not rotating when robot extension is moving..
Monday, March 22, 2010
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