If you are asking for who has a critical point dryer in the Bay Area,
I'm pretty certain that our friends at UC Berkeley have a Tousimis unit
that is very similar to ours.
Let me know if you need contact information over there.
Thanks,
John
On 12/27/2011 10:31 PM, Joo Yong Sim wrote:
> Dear SNF users,
>
> I was wondering if anyone had experience in a critical point dryer
> outside of SNF.
>
> If anyone could give me any advice, I would appreciate it.
>
> Thanks,
>
> Joo Yong
I have very little experience in critical point drying but here is
what I have learned this fall doing CPD.
(1) Do a trial run with your system first to know you can control the
temp of the water jacket accurately. This is important for maintaining
both temp and pressure, which can effect end results.
(2) Always try to let your gels sit overnight, and if possible in an
oven near 40-60 degrees C, to thoroughly form any bonds that are
available and complete the gelation.
(3) Depending on the gel your trying to dry, it may require several
hours of ethanol soaking to replace the water. I have learned that
many times it is necessary to move up in EtOH concentration in step
changes, starting near 10-20% and moving up to 200 proof. this could
take 2 or 3 days.
This may apply more to my system than your own and only some of my
gels have been successful, they have alot of glycerol in them, but
this is what I have learned thus far. I hope it helps.
-Travis
I was wondering if anyone had experience in depositing chromium by magnetron sputtering and could offer some advice on how to produce smooth homogenous films.
I'll provide some TEM images and deposition conditions if anyone could offer help on how to improve the films.
Regards,
Patrick
All tools will be shutdown by Wed. afternoon. Most analytical tools
will be removed from the lab as well. At 5 pm the lab will officially
close for business. Thanks all, for cleaning up!
And see you next year -- the lab will still look like the same old car,
but will have a shiny new engine underneath --
Happy Holidays --
Your SNF Staff
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu
Dear All,
A staff member found a USB stick in the gowning room. If it’s yours please come by and describe it because it’s somewhat unique. I’m in cubicle #41 on the first floor of the Allen Building.
Maureen
Come by for pizza and a chance to hear what some of your labmates have
been up to... EE412 presentations in just a few minutes, in the Annex
Auditorium!
Mary
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu
We are wrapping up another term -- and another session of EE412. Final
presentations will be given on Tuesday, Dec. 13, starting at 4 pm in the
AllenX Auditorium. Please come and see what your fellow labmates have
been up to. And be inspired to sign up for Spring term (when there will
be even more new tools to characterize!)
The agenda is as follows:
3:40-4:00 -- Pizza
4:00-4:10 -- A few words from our Instructors
4:10-4:35 -- Shane Crippen: Characterizing the Innotec for Sidewall
Electrodes Using Shadow Mask.
4:35-5:00 -- Tom Gwinn: Developing an Anisotropic Plasma Etch Process
for Thick Tungsten in the P5000
5:00-6:00 -- Insun Park, Young Ik Sohn, and Joo Yong Sim:
Characterization of Fiji ALD Film Quality and Conformality in High
Aspect Ratio/Deep Etched Structures
Check out what previous sessions of EE412 have accomplished by going to
the SNF wiki at:https://snf.stanford.edu/SNF/processes/ee412/
Hope to see you there --
Your EE412 Instructors
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu
Orlando,
I think Nanostructures can help you out. They are located in Santa Clara.
http://www.nanostructures.com/
Linda W.
From: "Orlando Trejo" <trejo10@stanford.edu>
To: labmembers@snf.stanford.edu
Sent: Monday, December 12, 2011 1:35:37 PM
Subject: Oxygen/Argon Plasma Ethching
Dear SNF member,
We are wrapping up another term -- and another session of EE412. Final
presentations will be given on Tuesday, Dec. 13, starting at 4 pm in the
AllenX Auditorium. Please come and see what your fellow labmates have
been up to. And be inspired to sign up for Spring term (when there will
be even more new tools to characterize!)
The agenda is as follows:
3:40-4:00 -- Pizza
4:00-4:10 -- A few words from our Instructors
4:10-4:35 -- Shane Crippen: Characterizing the Innotec for Sidewall
Electrodes Using Shadow Mask.
4:35-5:00 -- Tom Gwinn: Developing an Anisotropic Plasma Etch Process
for Thick Tungsten in the P5000
5:00-6:00 -- Insun Park, Young Ik Sohn, and Joo Yong Sim:
Characterization of Fiji ALD Film Quality and Conformality in High
Aspect Ratio/Deep Etched Structures
Check out what previous sessions of EE412 have accomplished by going to
the SNF wiki at: https://snf.stanford.edu/SNF/processes/ee412/
Hope to see you there --
Your EE412 Instructors
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu
Process cooling water is back on. Maintenance crew is working in the
lab to bring tools up. Here's a summary:
- Work is being done on the network. Sunray Coral is fine (internal
network.) Access to remote Coral and SNF emails may be spotty.
- ASML, innotec, metalica, gryphon so far look on track to be up soon.
ETA is around 1 pm. (Thanks Gary & Jim).
- Amtetcher is down hard; heat exchanger pump didn't survive.
P5000etch, mrc, and lampoly are up or nearly so. Stsetch2 is getting
there (Thanks Cesar!)
Many thanks also to Tony Padilla, the Facilities tech who came in both
last night and this morning to check on the water.
Mary
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu
The campus cooling water system is still being repaired. We've been
told it may be a few more hours. The campus cooling loop tempers the
building and lab air, so you will have noticed the lab getting quite
warm. Our building loop is cooled by the campus loop; we are now
running equipment using city water in the building loop. The
temperature is better now, but the pressure is much lower than most
tools would like, so some new equipment errors may arise.
The high water temperature appears to have caused our building loop to
spring a few significant leaks in the basement. So, there are concerns
that pressurizing our building loop may result in a flood. We are
scheduling additional Facilities and SNF staff in on Sunday morning to
be on-hand when the building loop is turned back on.
In short, tools with process cooling water problems will remain down for
the evening. We hope to be in a good position to restart tools in the
morning. Our apologies for the inconvenience, especially coming so
close to the shutdown. Please have patience as we all work through this.
Your SNF staff
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu
We've just been informed that there's a cooling water problem throughout
the campus. There is flow, but the temperature is high. It is also
possible that there are irregularities in flow. Tools using cooling
water will not function if temperature and flow are not within certain
limits and will stop processing. Facilities believes the problem will
be resolved within a couple of hours. In the meantime, we have several
reports of tools with turbo and RF failure. The ASML will not reboot.
These are all likely due to the cooling water problem. Once the water
is brought back into spec, most tools will reset themselves. In the
meantime, please do not override or clear errors, or reboot tools that
make use of cooling water -- the tools are protecting themselves.
Thanks,
Your SNF staff
All the canisters are full and we should be just fine for manual
development as well.
happy processing
litho team
We would like to try spin-on glass in our project and would like to know
if anyone would be kind enough to share a little spin-on glass with us.
We just need a little to spin one or two small chips. This SOG should
be SILICATE BASED only.
Thank you for your attention.
Ben Jian
Cell: 408-515-2783
We've been asked: what time do lab bins need to be emptied? Please
clear items by noon Monday (Dec. 12). We know you're working hard to
get as much done as possible before the extended shutdown. Staff,
however, are stretching to get everything buttoned up before shutdown.
Please help by collecting and storing your belongings in a safe place.
Thanks,
Your SNF Staff
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu
-----Original Message-----
From: Jasmine Hasi <jazz9152@slac.stanford.edu>
Date: Wed, 7 Dec 2011 23:54:20
To: <mbaran@stanford.edu>
Cc: <labmembers@snf.stanford.edu>; <cis-building@cis.stanford.edu>; <huldamuaka@hotmail.com>; <nlsmee@usfca.edu>; <smee@speakeasy.net>; <muchemu@gmail.com>; <akamau2@hotmail.com>
Subject: Bake Sale update
Dear All,
I want to say a huge thank you for everyone who bought goodies at the
bake sale or made a donation. We made a staggering $365...Wohoooo!
All the proceeds will be going directly to Insight World Aid.
I have cc'ed Nancy Smee who is one of the Board of Directors volunteering
for Insight, if you have any questions or interested to get involved.
In addition, I want to thank the amazing chefs who worked hard to make
this sale possible. A huge thank you to Maureen B, Hulda, Margaret,
Njoki, Mahnaz, Astrid, Uli, and Nancy for helping and working behind
the scenes.
Thank you all once again for your support and making this possible :)
Wish you all a Happy Holidays and a great start to the New year.
Jasmine
Try to make it through to night, Gary and Mario just added the last
bottles of developers to
canisters. we ordered 4 cases of developer, that is equivalent to 16
more gallons.
We have been told that we will get it by tomorrow morning ( thanks to
David, begging).
We have used 34 gallons of developer since last week.
Slow down people.
mahnaz
The critical permits have been approved so construction is officially
underway. The permit approvals were one of the key risk factors in this
project, so things are moving well and are on schedule.
Just a few reminders:
1. Make sure to remove all your personal items from the lab. ALL of
them. Remove them from bins, from WIP racks, from shared storage. If
someone you know isn't aware of this, please make sure they are informed
-- we will be losing about 1/3 of the bins in the lab to make way for
new equipment and stockroom supplies, so we will be revamping the lab
bin process. To start fresh, everyone will need to clear out all the
bins -- and rollarounds, and shelves, etc. Any personal items left in
the lab will be removed by Staff. We will store the items but please
understand we can't be responsible for possible loss or damage.
2. The last day the lab is open is Wednesday, 12/14/11. Because we
have to make the lab safe for construction, many tools will be brought
down before this date, as toxic gas lines need to be purged, wet bench
drains need to be flushed, all small tools will be removed from the
lab. A schedule for individual tool shutdowns has been posted to the
SNF website -- but be aware that dates may change as we get nearer to
the time. Please refer to the schedule, but check on Coral for details.
Finally, thank you for your patience -- we realize this renovation is
inconvenient for you all -- meaning your help and cooperation are that
much more appreciated --
Thanks again -
Your SNF Staff
I want to say a huge thank you for everyone who bought goodies at the
bake sale or made a donation. We made a staggering $365...Wohoooo!
All the proceeds will be going directly to Insight World Aid.
I have cc'ed Nancy Smee who is one of the Board of Directors volunteering
for Insight, if you have any questions or interested to get involved.
In addition, I want to thank the amazing chefs who worked hard to make
this sale possible. A huge thank you to Maureen B, Hulda, Margaret,
Njoki, Mahnaz, Astrid, Uli, and Nancy for helping and working behind
the scenes.
Thank you all once again for your support and making this possible :)
Wish you all a Happy Holidays and a great start to the New year.
Jasmine
Dear All,
Thank you so much for all your support with the Bake Sale yesterday. We still have some GREAT bake items left. We will be selling them today from 12:15 – 1:00P in the Break Room of the Allen Building.
Please stop by and see what we have left. All cookies will be $1.00 per packet.
Sincerely,
Maureen
With the lab shutdown, it may be a good time to give some thought
to.... starting your own company! If you are interested in learning
about the whole mysterious business of venture capital, Gavin McCraley
(Morrison & Foerster) and Shahin Farschi (Lux Capital) will be hosting a
clinic to answer your questions.
The Venture Clinic will be Friday, Dec. 9, starting at 2:30 pm in Allen
201 (note the room change.)
Contact info for our guest hosts:
Shahin Farshchi, Ph.D.
http://www.luxcapital.com
C: 925.323.2784
and
Gavin McCraley
Morrison& Foerster LLP
Direct: 650-813-4105
gmccraley@mofo.com
Come one, come all to our Bake Sale. It starts at 10:00A and will go until 1:00P. Please come buy something for your coffee break or your Lunch or for your family or
All OF THE ABOVE!!!!!!!!!!!!!
It is for a great cause – Insight World Aid – insightworldaid.org
Maureen
Dear All,
One of SNF’s Lab members lost her keys on Saturday. This set of keys has a pink and green rubberized turtle attach to them. If you find them please drop them off with me. I am in cubicle #41 on the first floor of the Allen Building.
Thank you,
Maureen
Thanks Maureen for sending this out as a reminder.
On Mon, 5 Dec 2011, Maureen Baran wrote:
> Dear All,
>
>
>
> Please don't forget the bake sale tomorrow in Nancy Latta's office, #145 on
> the first floor of the Allen Building. It will run from 8:00A to 1:00P.
> It's for a good cause.
>
>
>
> Thank you,
>
>
>
> Maureen
>
>
Dear All,
Please don’t forget the bake sale tomorrow in Nancy Latta’s office, #145 on the first floor of the Allen Building. It will run from 8:00A to 1:00P. It’s for a good cause.
Thank you,
Maureen
Found a Nokia phone on the couch out side of my office, come and claim it.
mahnaz
| Subject: | Imina Technologies miBots Nanomanipulation Workshop |
|---|---|
| Date: | Wed, 16 Nov 2011 10:39:39 -0800 |
| From: | Ed Myers <edmyers@stanford.edu> |
| To: | labmembers@snf.stanford.edu |
| CC: | tomlevesque424@gmail.com, dankleinen@aol.com |
The SNF Staff in conjunction with Imina Technologies is pleased to present: NANOMANIPULATION WORKSHOP Monday December 5, 2011 The miBots™ are coming! Do you have a need for manipulation or sensing small samples in a microscope? If so, we invite you to see these novel nanopositioners for yourself at the Stanford NanoFabrication Facility in a FREE, hands-on workshop on December 5th in the Paul Allen Building, Auditorium Room 101X. Designed especially for light microscopy, SEMs and FIBs, these affordable, easy-to-use mini robots are virtually untethered and free to move independently, opening new vistas for manipulation and testing at the macro, micro, or nanoscale. Working individually or in groups, the miBot™ uses a variety of tools such as grippers, probes, and optical fibers so that, in addition to manipulating the sample, they can illuminate a nano workspace and conduct force or electrical measurements. Robust, mechanically and thermally stable, and vacuum-ready, these tiny trojans are a great, customizable solution for maneuvering and testing cells, nanostructures, semiconductor devices, LEDs, and MEMs. miBots will be working in the Paul Allen Building, Auditorium Room 101X from 10 AM till Noon. For more information, or to register for workshop, click here http://imina.ch/events/registration-form-workshops-california-december-2011. Imina will contact you in the week before the workshop to confirm and provide a map and directions. Want to learn more? Visit us at www.imina.ch or give Tom Levesque a call at (972) 318-0196. Regards, SNF Staff
SNF has purchased a new vacuum sealer in hope of eliminating some of
the pain of bagging all the wafer boxes and masks.
The new tool is on the table close to EPI for now, this will be
temporary.
I wrote a quick instruction and is taped to the table, add to it if I
have missed anything.
The bags are in a blue tray and bigger so two box of wafers can be
sealed easily. please note that bags are special order and should not
be used for other things.
mahnaz
Party will start at 1:30 due to delay on refreshment delivery.
mahnaz
--
-----------------------------------------------------------------
David Goldhaber-Gordon goldhaber-gordon@stanford.edu
Associate Professor of Physics davidg@post.harvard.edu
and Director,
(permanent forwarding)
Center for Probing the Nanoscale
Stanford University
www.stanford.edu/group/cpn/
(650) 725-2047 (lab) (650) 724-3709 (office)
Address for letters or packages: Administrative Associate:
David Goldhaber-Gordon Roberta Edwards
Geballe Laboratory for Advanced Materials McCullough, Rm. 338
McCullough Building, Room 346 Phone: (650) 723-8028
476 Lomita Mall Fax: (650) 724-3681
Stanford, CA 94305-4045 email:
redward@stanford.edu
Just a reminder of the Annual Building Party! It's Friday (tomorrow!) Dec. 2, from 1-3 pm. This will be in the Allen building, just outside the yellow window area of the lab. Enjoy snacks, traditional games (the famous "wafer toss"), create your own silicon wafer ornament, and just spend some time reconnecting before heading off for the holidays. Stop on by for an afternoon break (generously sponsored by the CIS Affiliates.) Your CIS party committee
What: BAKE SALE…I know what you’re thinking wow, when the last time we had a bake sale. We were thinking the same thing so; we decided to have a bake sale.
Who: Friends of SNF are putting together this incredible eatable bake sale
When: Tuesday, December 6th from 8:00A to 1:00P
Why: Because this is the season to do good things for those less fortunate
Where: Nancy Latta’s Office #145 on the first floor of the Allen Building
Please come by and support your SNF Staff and Friends and purchase often through the morning and lunch hour.
Sincerely,
Maureen
On behalf of the SNF Staff and Friends of SNF
You are invited to the annual Allen Building holiday party, this Friday, Dec. 2, from 1-3 pm.
This will be in the Allen building, just outside the yellow window area of the lab.
Enjoy snacks, traditional games (the famous "wafer toss"), create your own silicon wafer
ornament, and just spend some time reconnecting before heading off for the holidays.
Stop on by for an afternoon break (generously sponsored by the CIS Affiliates.)
Your CIS party committee
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu
Renovation Countdown: 16 days!
As you know, the lab becomes a construction zone starting Thursday, Dec.
15. In preparation for construction, staff will need to ensure that all
equipment is safe (all toxic gases are purged from tools and process
lines, wet benches decontaminated) and ready for an extended shutdown
(chambers cleaned, pumps PM'ed, etc.) Also, all small tools, like
microscopes, will be removed from the lab. With over 100 tools in the
lab, we'll need to stage all these activities to ensure a smooth,
on-time handover. Attached is the current plan for tool shutdown.
Hopefully, this will help in your planning for any activities in
December -- please be aware this schedule is subject to change, but that
any changes will be communicated via regular updates and on Coral.
Thanks for your patience as we ramp up our shutdown plans.
Your SNF Staff
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu
Happy Thanksgiving!
May I know if anyone has access to an infra-red imaging camera or know
if any such facility exists on campus?
Thanks in advance for any replies!
Ben
--
Benjamin Tee
Ph.D Candidate, Electrical Engineering
Stanford University
Cell: 650-704-4300
M.S (EE) Stanford University '07
B.S.E (EE) University of Michigan - Ann Arbor '06
Bao Research Group - http://baogroup.stanford.edu
Address:
381 North South Mall Rm 209
Stanford CA 94305
USA
While you are resting up over the long weekend, now would be a great
time to sign up for the miBots Workshop.
The SNF Staff in conjunction with Imina Technologies is pleased to present:
NANOMANIPULATION WORKSHOP
Monday December 5, 2011
The miBots™ are coming! Do you have a need for manipulation or sensing
small samples in a microscope? If so, we invite you to see these novel
nanopositioners for yourself at the Stanford NanoFabrication Facility in
a FREE, hands-on workshop on December 5th in the Paul Allen Building,
Auditorium Room 101X. Designed especially for light microscopy, SEMs and
FIBs, these affordable, easy-to-use mini robots are virtually untethered
and free to move independently, opening new vistas for manipulation and
testing at the macro, micro, or nanoscale. Working individually or in
groups, the miBot™ uses a variety of tools such as grippers, probes, and
optical fibers so that, in addition to manipulating the sample, they can
illuminate a nano workspace and conduct force or electrical
measurements. Robust, mechanically and thermally stable, and
vacuum-ready, these tiny trojans are a great, customizable solution for
maneuvering and testing cells, nanostructures, semiconductor devices,
LEDs, and MEMs.
miBots will be working in the Paul Allen Building, Auditorium Room 101X
from 10 AM till Noon.
For more information, or to register for workshop, click here
http://imina.ch/events/registration-form-workshops-california-december-2011.
Imina will contact you in the week before the workshop to confirm and
provide a map and directions.
Want to learn more? Visit us at www.imina.ch or give Tom Levesque a call
at (972) 318-0196.
Regards, SNF Staff
Hi all,
I would like to have some wafers to be annealed in High pressure (>=100bar) and high temperature (1000C-1400C) at N2 ambient, does anyone know any company or institute provide such service?
Your input and comments will be much appreciated.
Wish you all have a great thanksgiving holiday!
Gavin
You may have noticed a number of people walking around the building in
construction helmets and orange vests. Construction is well underway in
the basement and in the area above the lab. Here's a quick update of
activities which may be relevant to your work here.
The former CAD room will soon house the new maintenance office area and
workshop. The ASML emulator and CAD desktops are now located in the
cube area near the Maureen's office. The probe
station/micromanipulator6000 is now located in room 144, near the cube
area (thanks to Andreas for setting it back up and even cleaning the
dust!) These are still available for your use - please remember to
clean up when you are done.
We hand over the keys to the lab to contractors on Thursday, Dec. 15. To
make equipment safe to exist in a construction zone, process gases will
need to be purged, wet benches drained and rinsed, microscopes will be
removed, etc. All this takes time, so tools will be shutdown in the
days leading up to 12/15. We should have a schedule of planned tool
shutdown early next week, to help plan your work in December accordingly.
Please remember to remove all your personal items from bins and WIP
shelves by the morning of Monday, Dec. 12. Items left in the lab will
be removed by staff. (Remember, this will be a construction zone - any
damage to equipment will be covered by liability, but damaged masks and
wafers will not be.) There will be no bin charges in December; bins
will assigned again when the lab reopens.
Lastly, the red lockers can be used for storing personal items, but they
will not be accessible during construction. So anything you leave in
them will have to stay until the lab reopens. We'd like to encourage
you to turn in you locker key if you don't think you will use it.
One more thing -- many thanks to everyone who cleaned up items in the
former CAD room and the cube area -- it helped enormously in staging our
moves. And your understanding and support (which we will need more of
in coming weeks!) are greatly appreciated.
Your SNF Staff
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu
While attending IEDM over the years (or any big conference for that matter), selecting which papers to attend has been a drudgery. Going back and forth between the conference leaflet and the abstract booklet, and then discovering that their exists an conflict between the papers i wanted to attend and finally loosing the piece of paper with my schedule on the first day of the conference.
This motivated me to create a iPhone/iPad/iPod which will allow the participants to browse the schedule : showing them all the sessions going on at a particular time and then choose one, browse the papers by the category, find which room to go to next to attend the next paper.
The app is live on the Appstore now and you can search for it by typing "IEDM" in the Appstore. Alternatively you can get it use this link : http://itunes.apple.com/us/app/iedm-2011/id478640054?ls=1&mt=8
App Description :
This app allows you to browse through the schedule of IEDM 2011 conference, select the papers you want to attend and make your conference calendar. Browse all the papers being presented at a particular time slot or alternatively browse the papers by conference categories. You can read through the abstract of the papers and select the ones you want to attend to make your conference itinerary. This app also allows you to do a live search over the extended abstracts to quickly narrow all the papers on a particular topic (e.g. Flash Memory) or from a particular institution (e.g. Stanford University).
The App for IEDM 2011 is sponsored by Applied Materials.
Please have fun using the app and let me know of your feedback.
Best Regards,
Aneesh
What are the dose and energy of the implant that you plan to do?
To first order, the implant depth in oxide is comparable to that in silicon. As I recall (don't take this as an accurate number) the mean implant depth of 100 keV phosphorus is about 125 nm. However, if you tried to use 125 nm of masking oxide, you'd be in serious trouble because fully half of the dopant would penetrate the oxide. Absent more accurate numbers, I'd suggest that a masking oxide thickness of 2.5 to 3.0 times the mean implant depth in silicon. For 100 keV phosphorus, I'd suggest that about 400 nm of oxide is probably safe. Note: heat treatment following implant also needs to be considered but is often a second order consideration unless post-implant heat treatment is really hot or long.
Let me know if you have other questions or are worried about trusting my now-addled memory about such matters.
John
Sent from my iPhone
On Nov 21, 2011, at 5:04 PM, Stephanie Claussen <sclaussen@stanford.edu> wrote:
> Hi all,
>
> I am planning on doing phosphorous ion implantation this week at INNOViON in San Jose. This will be on an already-fabricated vertical pin structure. I was planning to deposit LPCVD oxide over my entire structure, then pattern and etch it to open up the n regions where I want the ions implanted.
>
> Can anyone tell me how thick this oxide should be to prevent P doping in my p region? Your prompt responses are greatly appreciated, as this is a process I was planning on carrying out over the next day or two.
>
> Thanks so much,
> Stephanie
With the cleanup going on in, out and around the lab, a concerned labmember has given me two mismatched non pierced earrings that have been in the gowning room for some time. One has rhinestones and a teardrop pearl and the other is an outline of a bow with a heart on the end of one of the strings.
If either or both are yours, please come by my cubicle to claim.
Thank you,
Maureen
me again, I have a labmember totally stressed.
Will you please look around and see if you can find a small box that
contains
Two 6" boxes, one of the box contains 25 wafers and the other box is empty.
There should be a mask in the box as well.
Please if you find it, give it or leave it in front of any staff's or
Maureen's office.
Any help in this matter is much appreciated.
mahnaz
A labmember is missing a full box of 6" wafers that was in a cardboard
box along with an empty 6" box on her desk.
The box was sitting on the desk and I saw the box in the morning.
If you have taken the wafers by mistake, please bring it back.
mahnaz
NANOMANIPULATION WORKSHOP
Monday December 5, 2011
The miBots™ are coming! Do you have a need for manipulation or sensing
small samples in a microscope? If so, we invite you to see these novel
nanopositioners for yourself at the Stanford NanoFabrication Facility in
a FREE, hands-on workshop on December 5th in the Paul Allen Building,
Auditorium Room 101X.
Designed especially for light microscopy, SEMs and FIBs, these
affordable, easy-to-use mini robots are virtually untethered and free to
move independently, opening new vistas for manipulation and testing at
the macro, micro, or nanoscale. Working individually or in groups, the
miBot™ uses a variety of tools such as grippers, probes, and optical
fibers so that, in addition to manipulating the sample, they can
illuminate a nano workspace and conduct force or electrical
measurements. Robust, mechanically and thermally stable, and
vacuum-ready, these tiny trojans are a great, customizable solution for
maneuvering and testing cells, nanostructures, semiconductor devices,
LEDs, and MEMs.
miBots will be working in the Paul Allen Building, Auditorium Room 101X
from 10 AM till Noon.
For more information, or to register for workshop, click here
http://imina.ch/events/registration-form-workshops-california-december-2011.
Imina will contact you in the week before the workshop to confirm and
provide a map and directions.
Want to learn more? Visit us at www.imina.ch or give Tom Levesque a call
at (972) 318-0196.
Regards,
SNF Staff
Qiushi(Helen) Ran
=========================================
Department of Electrical Engineering
Stanford University, Stanford, CA 94305.
Mobile: +1-650-796-1439
Email: qran@stanford.edu
While I don't yet know what caused the Sunrays to be unresponsive, I've
reset them (on the server) and they seem to be functional once again. I
apologize for the outage and will try to resolve what may have caused
this tomorrow.
John
On 11/12/2011 9:29 PM, J. Jason Lin wrote:
> Can a staff member troubleshoot the problem?
Yes, it's only a month away... Thanks to all who have cleaned up the
151/CAD room and the shared cubicle area -- it is much appreciated by
staff.
Please remember that the lab will belong to the contractors starting
Dec. 15, so staff will need to put all the equipment into a safe
condition for long term shutdown before 7 am that day. This means that
individual tools may be shutdown several days before this date,
depending on what needs to be done. We plan to post a schedule in
coming weeks.
Please also remember to remove ALL PERSONAL BELONGINGS from your lab
bins, roll-around carts, WIP racks, and mask bins. There will be major
construction done in the lab and we will not be able to ensure that your
items will be safe. We will also take the opportunity to remove lab
bins to allow installation of new equipment -- so bins will be
reassigned to active labmembers when the lab reopens Feb. 1. (Be
assured, there will be no bin charges in Dec./Jan.)
Thanks for your attention and patience --
Your SNF Staff
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu
Thanks,
Shibing
--
Shibing Wang
Postdoctoral Scholar
Geological and Environmental Sciences
Stanford University
450 Serra Mall
Braun Hall, Building 320
Stanford University
Stanford, CA 94305-2115
shibingw@stanford.edu
650-862-3001
University Ph.D. Dissertation Defense
Department of Electrical Engineering
Tunable Photonic Crystal Biosensors for Portable Label-Free Diagnostics
Meredith M. Lee
Advisor: Professor James S. Harris
Co-Advisor: Professor Shanhui Fan
Friday, November 11, 2011
10 AM (refreshments at 9:45 AM)
Allen (Center for Integrated Systems-X) Auditorium
I'm sorry for my fool mistake but seminar is starting at "Allen 101",
not "Allen 101X".
Ken
On Wed, 09 Nov 2011 18:57:28 -0800
Kentaro Iwami <iwami@stanford.edu> wrote:
> Hi All,
>
> Prof. Keisuke Morishima, former SNF labmember from Osaka University will visit Stanford tomorrow.
> He is an authority of BioMEMS and will be speaking "Emergent Functionality of Cellular Buildup Wet
> Robotics", including MEMS-fabricated muscle-powered bioactuator and biochemical energy source.
> I strongly recommend to join it!
>
> Title: Emergent Functionality of Cellular Buildup Wet Robotics
> Author: Keisuke Morishima, Department of Mechanical Engineering,
> Osaka University, 2-1 Yamadaoka, Suita 565-0871, JAPAN
> Place Allen 101X, 11/10/2011 (Thu), 1:30pm-2:30pm
> Abstract:
> We have demonstrated an environmentally robust hybrid (biotic?abiotic) robotic system that uses
> living components, called "Cellular Build Up Wet Nano Robotics". Our group has already presented
> a bioactuator using rat heart muscle cells, but it is difficult to keep rat heart muscle cells
> contracting spontaneously without maintaining the culture conditions carefully. By contrast, insect
> cells are much robust over a range of culture conditions (temperature, osmotic pressure and pH)
> compared to mammalian cells. Therefore, insect cells are more practical use of a hybrid wet robotic
> system, and they can be driven without precise environmental control. From this point of view, to
> utilize robust biological components as a functional systems and self assembly process and their
> emergent functionality, and to build up such a soft and wet machines will lead us an innovative
> fundamental change and produce a new principle and design to future man-made systems. We
> demonstrate the example of a micro bioactuator and mechanical systems driven by biochemical energy.
> This novel muscle-powered bioactuator successfully show autonomous beating at room temperature for
> a long time without maintenance. Experimental results suggest the possibility of constructing an
> environmentally robust hybrid wet robotic system with living components and open up a new science
> and technology, biorobotic approach, medical, environmental monitoring, agriculture and industrial
> application.
>
>
>
> -------------------------------------------------------------------------
> Kentaro IWAMI, Ph. D.
> Visiting scholar, Center for Integrated Systems, Stanford University
> Paul G. Allen Building, 420 Via Palou Mall, Room 113, Stanford, CA 94305-4070 USA
> Tel: 650-223-3817 E-mail: iwami@stanford.edu
>
> Assistant Professor, Department of Mechanical Systems Engineering,
> Tokyo University of Agriculture and Technology
> 2-24-16 Nakacho, Koganei, Tokyo 184-8588 Japan
> Tel: +81-42-388-7422 Fax: +81-42-388-7093 E-mail:k_iwami@cc.tuat.ac.jp
> -------------------------------------------------------------------------
There was report of an odor in the litho area around 12:50.
After evacuating the litho area, Mary, Maurice and i realized that is
Electrical and the source seems to be coming from ASML.
We have powered down the ASML and Linda has called FSE for help.
Litho will be open at 2 pm and we will update you as what the status of
the ASML will be.
mahnaz
Prof. Keisuke Morishima, former SNF labmember from Osaka University will visit Stanford tomorrow.
He is an authority of BioMEMS and will be speaking "Emergent Functionality of Cellular Buildup Wet
Robotics", including MEMS-fabricated muscle-powered bioactuator and biochemical energy source.
I strongly recommend to join it!
Title: Emergent Functionality of Cellular Buildup Wet Robotics
Author: Keisuke Morishima, Department of Mechanical Engineering,
Osaka University, 2-1 Yamadaoka, Suita 565-0871, JAPAN
Place Allen 101X, 11/10/2011 (Thu), 1:30pm-2:30pm
Abstract:
We have demonstrated an environmentally robust hybrid (biotic?abiotic) robotic system that uses
living components, called "Cellular Build Up Wet Nano Robotics". Our group has already presented
a bioactuator using rat heart muscle cells, but it is difficult to keep rat heart muscle cells
contracting spontaneously without maintaining the culture conditions carefully. By contrast, insect
cells are much robust over a range of culture conditions (temperature, osmotic pressure and pH)
compared to mammalian cells. Therefore, insect cells are more practical use of a hybrid wet robotic
system, and they can be driven without precise environmental control. From this point of view, to
utilize robust biological components as a functional systems and self assembly process and their
emergent functionality, and to build up such a soft and wet machines will lead us an innovative
fundamental change and produce a new principle and design to future man-made systems. We
demonstrate the example of a micro bioactuator and mechanical systems driven by biochemical energy.
This novel muscle-powered bioactuator successfully show autonomous beating at room temperature for
a long time without maintenance. Experimental results suggest the possibility of constructing an
environmentally robust hybrid wet robotic system with living components and open up a new science
and technology, biorobotic approach, medical, environmental monitoring, agriculture and industrial
application.
-------------------------------------------------------------------------
Kentaro IWAMI, Ph. D.
Visiting scholar, Center for Integrated Systems, Stanford University
Paul G. Allen Building, 420 Via Palou Mall, Room 113, Stanford, CA 94305-4070 USA
Tel: 650-223-3817 E-mail: iwami@stanford.edu
Assistant Professor, Department of Mechanical Systems Engineering,
Tokyo University of Agriculture and Technology
2-24-16 Nakacho, Koganei, Tokyo 184-8588 Japan
Tel: +81-42-388-7422 Fax: +81-42-388-7093 E-mail:k_iwami@cc.tuat.ac.jp
-------------------------------------------------------------------------
Modeling the electronic structure of semiconductor devices
Dr. Mike Stopa
Director of National Nanotechnology Infrastructure Network Computation Project
Center for Nanoscale Systems
Harvard University
Time: 10 am, Thursday November 10, 2011
Modeling of the electronic structure of nano-scale semiconductor devices is a both conceptually and practically difficult task that is invaluable for experimentalists and device engineers. The complexity and variety of semiconductor devices, in their morphology or material composition or in the specific features that are under investigation, generally inhibit the development of any "all purpose code" that simulates all properties of all devices. The SETE code, which I will discuss in this talk, was initially developed to model GaAs-AlGaAs heterostructure-based two dimensional electron gas (2DEG) devices, but has since been applied to other systems. Modification to other systems typically means that only the most fundamental features of the SETE code are transferable. A brief list of some of the systems, materials and properties that have been modeled by SETE and its variants is:
· Semiconductor nanowires;
· Configuration interaction calculation in quantum dots;
· Magnetic terraces (compressible and incompressible regions) in the 2DEG in the quantum Hall regime;
· Complicated band structure using k dot p (Luttinger Hamiltonian) formalism;
· Förster transfer process between semiconductor nanoparticles;
· Strain effect on electronic structure;
· Molecular systems adjacent to (adsorbed on) metal surfaces.
University Ph.D. Dissertation Defense
Department of Materials Science and Engineering
All-epitaxial orientation-patterned III-V semiconductors for nonlinear optics
Angie C. Lin
Advisor: Professor James S. Harris
Tuesday, November 8, 2011
10 am (refreshments at 9:45 am)
CIS-X Auditorium, Paul G. Allen building
Applications such as airborne countermeasures, chemical spectroscopy, and imaging require high-power, compact, and tunable light sources in the infrared (IR) and Terahertz (THz) spectral ranges. While laser sources exist at certain frequencies in this range, they are bulky and require low temperature operation. Another solution is to generate the desired IR and THz frequencies through nonlinear optical frequency conversion in orientation-patterned III-V semiconductors, from readily available high-power lasers in the near-IR. Achieving high conversion efficiencies requires the optical signals to be quasi-phase-matched (QPM) inside the semiconductor.
Orientation-patterning is an all-epitaxial technique in which we fabricate QPM semiconductor structures by the following steps: growth by molecular beam epitaxy (MBE), lithography, etching, and regrowth by MBE. Previous work on orientation-patterned GaAs has led to demonstration of a variety of nonlinear optical devices; however, there is a push to develop orientation-patterned GaP (OP-GaP) to overcome inherent material limitations in GaAs. This thesis work has been focused on the development of OP-GaP, including MBE growth and characterization of GaP films on Si and processing of OP-GaP structures. Improvements in material quality have been made through the course of studying the nucleation and growth conditions of GaP on Si to control the formation and annihilation of antiphase domain defects. Understanding the growth of GaP on Si has not only enabled the development of OP-GaP as a platform for nonlinear optical devices, but also for III-V epitaxial mirrors on Si substrates for optical coatings.
The SNF staff wants to remind you we will be holding the Process Clinic
weekly until the shutdown. The Process Clinic is held between 2pm-3pm,
so please bring your process, equipment or miscellaneous questions.
Due to lack of conference rooms, today's Process Clinic will be held in
the cubicles outside of the staff offices.
Regards,
SNF Staff
Reconfigurable Optics Based on Liquid-Liquid Interfaces
Prof. Sindy K. Y. Tang
Dept. of Mechanical Engineering, Stanford University
Abstract:
Optofluidics, a new class of optical devices with optical interfaces formed between two liquids, possess unique characteristics that are not achievable in conventional solid-state optical systems. In optofluidic systems, it is possible to reconfigure and fine-tune the optical output in real time by manipulating liquid composition or the shape of the liquid-liquid interface dynamically. In addition, liquid-liquid interfaces are intrinsically smooth as a result of minimization of interfacial energy. Polishing is thus unnecessary. Furthermore, it is straightforward to obtain a graded profile of refractive index by taking advantage of diffusion between miscible liquids possessing different refractive indices to create devices such as GRIN lenses. This talk focuses on the design and development of optical components based on dynamic liquid-liquid interfaces in microfluidic systems: liquid waveguides, lenses, and multi-color droplet dye lasers.
