Comment p5000etch SNF 2008-01-31 14:37:19: Ch.C down for handling.

Intermittently faults for encoder error when running in Auto but not in manual.

Re: Shutdown p5000etch SNF 2008-01-31 04:02:14: wafer stuck in Ch C

Robot was stuck on the door. Straightened out the robot and unloaded user's wafer. Now intermittently faulting for an extension encoder error when running ch.C in auto. Does not fail when moving wafer in and out the chamber in manual. will continue to troubleshoot tomorrow. Cycled 30 wafers though Ch.B with no problems.

Shutdown p5000etch SNF 2008-01-31 04:02:14: wafer stuck in Ch C

Comment p5000etch SNF 2008-01-30 15:14:14: Ch.A down for heat exchanger

Heat exchange shuts down because of a flow fault. Possibly a defective flow meter. Need to troubleshoot further.

Re: Problem p5000etch SNF 2008-01-28 18:42:35: Trouble with robot arm

Cleaned and reseated two connectors in the robot drive assembly. Changed system constant 107 (comb sensor test status) from 2 to 1. When it was set at 2, the system kept failing for "comb sensor not in correct location". Set at 1, error has not reoccured after 68 wafers cycled through Ch.C.

Re: Comment p5000etch SNF 2008-01-30 12:37:49: Update

Ran 68 wafers straight with no problems.

Re: Shutdown p5000etch SNF 2008-01-29 14:42:51: Robot extension problem

Cleaned and reseated two connectors in the robot drive assembly. Changed system constant 107 (comb sensor test status) from 2 to 1. When it was set at 2, the system kept failing for "comb sensor not in correct location". Set at 1, error has not reoccured after 68 wafers cycled through Ch.C. Ran "Ch.C Hanjun" recipe to verify chamber operations.

Comment p5000etch SNF 2008-01-30 12:37:49: Update

Cleaned and reseated two connectors in the robot drive assembly. Changed system constant 107 (comb sensor test status) from 2 to 1. When it was set at 2, the system kept failing for "comb sensor not in correct location". Set at 1, error has not reoccured after 20 wafers cycled through Ch.C. Will cycle wafers until 3 pm. Will release system if no other faults.

Shutdown p5000etch SNF 2008-01-29 14:42:51: Robot extension problem

Robot extension errors are occuring more frequently now. Power supply voltages checked ok. Possible back robot cable. Will continue to troubleshoot.

Re: Shutdown p5000etch SNF 2008-01-29 08:08:30: wafer is stuck in LL

Removed user's stuck wafer.

Re: Problem p5000etch SNF 2008-01-29 06:37:59: One wafer is stuck in load lock chamber

Removed user's stuck wafer.

Shutdown p5000etch SNF 2008-01-29 08:08:30: wafer is stuck in LL

By looking inside LL, wafer falls down from arm

Problem p5000etch SNF 2008-01-29 06:37:59: One wafer is stuck in load lock chamber

When I started giving one wafer into LL,
Robot was stuck when it picked up the wafer.
I followed the procedure in the manual and robot returned
back to LL. However, it seems robot lost its position and
couldn't go to home position.
The errors which I saw are:
(1)Encorder error
(2)Cannot go to elevator slot with wafer
(3)Cannot return wafer on vacuum chack until robot is homed
(4)Storage position is not known.

Problem p5000etch SNF 2008-01-29 00:21:28: HT EX problem in ChA

Problem p5000etch SNF 2008-01-28 18:42:35: Trouble with robot arm

I ran 12 dummy wafers in 3 lots (with 4 wafers per lot) in Chamber C. The outcome was:
1) First lot etched fine, but gave an error "Cannot complete: Robot extension position is not known".
2) Second lot didn't enter the etch chamber C at all. The same error as above showed up before the wafers could be loaded into the chamber.
3) Third lot proceeded fine upto 2 wafers and then the third wafer was not loaded into the chamber C because of the same error as above.
Upon checking the error log, it appears as though the encoder on the robot arm motor has problems.

Comment p5000etch SNF 2008-01-28 16:23:47: Side B works

I used Ch C, used side B to load the wafers, it worked alright.

Re: Problem p5000etch SNF 2008-01-26 20:34:57: Ch.C loading/unloading

Adjusted the slit door opening speed. Cycled 8 wafers through the chamber without problems.

Re: Problem p5000etch SNF 2008-01-26 21:05:13: Wafer stuck inside

Adjusted the slit door opening speed. Cycled 8 wafers through the chamber without problems.

Re: Problem p5000etch SNF 2008-01-27 11:32:28: Ch C down

Adjusted the slit door opening speed. Cycled 8 wafers through the chamber without problems.

Problem p5000etch SNF 2008-01-27 11:32:28: Ch C down

I managed to recover the system from the frozen state and put Ch C offline. Note that the previous user's wafer is still stuck in Chamber C.
You can use other chambers, but I recommend using it in the manual mode. It has been giving a lot of errors related to loading and unloading.

Problem p5000etch SNF 2008-01-26 21:05:13: Wafer stuck inside

One of my wafers got stuck in the chamber C. There was an error stating "Chamber C slit valve did not open in maximum allowed time". After waiting a little, I tried the recovery procedure...but could not make much progress as I could not switch to manual mode. Fortunately, it is a dummy wafer.

Problem p5000etch SNF 2008-01-26 20:34:57: Ch.C loading/unloading

Door slit fails to close/open error message still occurs occasionally.

Problem p5000etch SNF 2008-01-25 15:18:39: use load side B...

side A, when unloading, pulls the wafer out ~1/2 inch
May be too close to LL door & might smash your wafer

Re: Problem p5000etch SNF 2008-01-03 17:37:50: Ch B offline for pump repair.

Chamber B back online.

Re: Problem p5000etch SNF 2008-01-09 09:12:02: CHB still down. CHA/C OK to use.

Installed rebuilded turbo pump and controller and also,
changed change clamping kit and pedestal quartz ring.
Chamber will need to be condition before running sample.

Re: Problem p5000etch SNF 2008-01-16 20:53:30: both HX's dead.

Top off heat exchanger..

Re: Problem p5000etch SNF 2008-01-24 11:37:40: Cassette A clamp not opening

Repaired cassette clamp.

Problem p5000etch SNF 2008-01-24 11:37:40: Cassette A clamp not opening

Cassette A clamp is not fully opening. Tried adjusting the pneumatic actuator but still not working properly.
Please use Cassette B.

Re: Shutdown p5000etch SNF 2008-01-23 20:54:47: Wafer stuck while unloading

Adjusted Ch.C slit door pneumatic actuator speed. Cycled many times with no problems. Moved wafer in and out of the chamber with no problems.

Shutdown p5000etch SNF 2008-01-23 20:54:47: Wafer stuck while unloading

Error message: Chamber C door slit did not close within time limit

Re: Shutdown p5000etch SNF 2008-01-17 08:34:40: Heatexchanger 0 has bo flow.

heatexchanger is back up

Shutdown p5000etch SNF 2008-01-17 08:34:40: Heatexchanger 0 has bo flow.

Problem p5000etch SNF 2008-01-16 20:53:30: both HX's dead.

HX1 and HX2 appear to have tripped off. Indicating
low fluid, and temp out of setpoint.

Re: Shutdown p5000etch SNF 2008-01-16 14:29:28: Wafers stuck

Recovred wafer from chamber C.

Shutdown p5000etch SNF 2008-01-16 14:29:28: Wafers stuck

Was running Ch.C Poly Etch
Error: Chamber C door slit did not close within time limit

Re: Problem p5000etch SNF 2008-01-15 16:55:45: Why is chamber C offline?

Online chamber C.

Problem p5000etch SNF 2008-01-15 16:55:45: Why is chamber C offline?

I tried to use Ch. C for Si etch but found it to be offline. Is there any reason why Ch C is offline? I could not find any information on Coral. Thanks

Comment p5000etch SNF 2008-01-14 12:18:20: Turbo pump

The turbo pump bearing for chambert b seized up, I'm
looking for a replacement. I will update as soon as I find
a replacement turbo pump.

Re: Shutdown p5000etch SNF 2008-01-10 15:15:43: wafer broke while unloading

No problems with the handler. User logged problem on the wrong tool down.

Shutdown p5000etch SNF 2008-01-10 15:15:43: wafer broke while unloading

Unloading arm broke the wafer.

Problem p5000etch SNF 2008-01-09 09:12:02: CHB still down. CHA/C OK to use.

Re: Comment p5000etch SNF 2008-01-03 14:12:56: Restarted Ch.A and Ch. C pumps

Re: Comment p5000etch SNF 2007-12-16 07:42:54: Chamber B

updated comment posted.

Re: Comment p5000etch SNF 2007-12-11 16:29:11: Ch.A metal etch worked, but finicky

noted

Comment p5000etch SNF 2008-01-08 10:12:52: Turbo controller for Cha. B

The rebuild turbo controller that I order before the shutdown
has a problem with the eeprom, I called the vendor where
I ordered the controller from and they will send another
controller asap.

Problem p5000etch SNF 2008-01-03 17:37:50: Ch B offline for pump repair.

Ch A and Ch C are ok to use.

Re: Comment p5000etch SNF 2007-12-13 23:14:11: Ch.C is OK

Re: Problem p5000etch SNF 2007-12-15 00:02:50: Ch.B offline

Re: Problem p5000etch SNF 2007-12-15 01:00:55: ChB down

Re: Problem p5000etch SNF 2007-12-15 00:20:08: ch B down

Comment p5000etch SNF 2008-01-03 14:12:56: Restarted Ch.A and Ch. C pumps

Chamber now online