Sunday, March 21, 2010

Comment p5000etch SNF 2010-03-21 21:35:26: Update

Adjusted the clamping force, the best backside he i can get
is 1.5sccm he leak with clamping force at almost max down.
we may need to change the spring on the cathode assembly?
Also changed the silt door actuator valve from our spare but
is also bad (intermittently will not open), re-installed
original actualtor valve., will continue working on the problem
tomorrow..

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