Re: Problem p5000etch SNF 2007-12-18 10:50:18: My wafer is inside the machine

Recovered wafer from storage elevator.

Problem p5000etch SNF 2007-12-18 10:50:18: My wafer is inside the machine

It shows that my wafer is in the elevator, but it cannot sense the wafer. Please save my wafer...

Comment p5000etch SNF 2007-12-16 07:42:54: Chamber B

The turbo pump controller smoked(transformer shorted)
chamber b will be down for a while, we don't have a spare
controller in our stock.

Problem p5000etch SNF 2007-12-15 01:00:55: ChB down

When I was about to load my wafers we all heard a loud blast from p5000 followed by a smell of burnt bakelite. Ericp was there and he concluded after some inspection that the problem was possibly related to some electrical circuit/cable and put chamber B offline. Ch A and Ch C seems to work fine. I used Ch C after that without any problem.

Problem p5000etch SNF 2007-12-15 00:20:08: ch B down

Problem p5000etch SNF 2007-12-15 00:02:50: Ch.B offline

Something seems to blow up.

Re: Problem p5000etch SNF 2007-12-13 19:13:04: Ch.C high He leak rate

User loaded same wafer and he leak was ok.

Comment p5000etch SNF 2007-12-13 23:14:11: Ch.C is OK

Leak rate back to normal

Problem p5000etch SNF 2007-12-13 19:13:04: Ch.C high He leak rate

Re: Comment p5000etch SNF 2007-12-10 10:23:20: Chamber C slit door actuator is sticking.

Re: Comment p5000etch SNF 2007-12-07 21:51:37: recovered wafer from B

Re: Comment p5000etch SNF 2007-12-07 13:31:57: Ch C Online

Re: Comment p5000etch SNF 2007-12-13 02:42:06: Wafer stuck in chamber B

Re: Problem p5000etch SNF 2007-12-13 01:23:17: wafers stuck

Robot stepper drivers lose communication, had shut
off 48v and manually move robot to position and intialized
after.

Comment p5000etch SNF 2007-12-13 02:42:06: Wafer stuck in chamber B

Problem p5000etch SNF 2007-12-13 01:23:17: wafers stuck

The handler is stuck in Chamber B. 1 wafer in the chamber and 5 wafers on the elevator. I am not red-lighting in case someone can fix it before the morning.

Re: Problem p5000etch SNF 2007-12-12 02:58:10: Helium leak problem and broken wafer in chamber

Re: Comment p5000etch SNF 2007-12-12 08:54:12: No problem found on any of the two chamber D and C,

No wafer found on chamber b or c.

Comment p5000etch SNF 2007-12-12 08:54:12: No problem found on any of the two chamber D and C,

Problem p5000etch SNF 2007-12-12 02:58:10: Helium leak problem and broken wafer in chamber

Chambers B and C both ahd helium leak problems and there is a broken wafer in Chamber C. I did not red light since other chambers may be used. I have put a warning for Ch. C on the machine.

Comment p5000etch SNF 2007-12-11 16:29:11: Ch.A metal etch worked, but finicky

I ran some test wafers and two device wafers thru Chamber A (metal timed etch). Worked, but machine was finicky and required frequent intervention by Cesar to maintain correct servo pressure. Also, Ch. A recipes wouldn't communicate with endpt PC so we had to use fixed-time etch (i.e. 'no endpoint') option on all steps.

Re: Problem p5000etch SNF 2007-12-07 17:04:11: Wafer Lost

Re: Problem p5000etch SNF 2007-12-05 12:44:14:

Re: Problem p5000etch SNF 2007-12-07 12:03:51: Ch.C is offline

Re: Shutdown p5000etch SNF 2007-12-11 09:02:29: Slit door problem on chamber C..

All chamber's are back online. Repaired bad slit door
on chamber C and replaced 2amp fuse ob chamber A.
Cycled wafer on all three chambers.

Re: Problem p5000etch SNF 2007-12-10 03:04:31:

Re: Problem p5000etch SNF 2007-12-10 03:05:58: ChC

Shutdown p5000etch SNF 2007-12-11 09:02:29: Slit door problem on chamber C..

Comment p5000etch SNF 2007-12-10 10:23:20: Chamber C slit door actuator is sticking.

Problem p5000etch SNF 2007-12-10 03:05:58: ChC

ChC couldn't load wafers, the chamber door wouldn't open in time. Also ChC went offline in the middle of processing!!!!!

Problem p5000etch SNF 2007-12-10 03:04:31:

P5000 had problem loading wafers into Chamber C...the chamber door wouldn't open in time. ChC went offline in the middle of processing!!!!!!!

Comment p5000etch SNF 2007-12-07 21:51:37: recovered wafer from B

The wafer has been recovered from Ch.B.
However, the following problems still exist:
* The clamp needs to be replaced in B. It looks to me
like the wafer may have broken because of the worn clamp.
* The robot still gets lost. (Cesar will repair next week).
* E/E door still sticky. (;arts on order? I think).
* Ch.A still offline- unsure why.

Problem p5000etch SNF 2007-12-07 17:04:11: Wafer Lost

machine will not return wafer. There is possibly a broken piece of the wafer still on the elevator, or the entire wafer is in chamber b. we would redlight, but don't want to take the machine down for the weekend. hopefully someone (ericp?) will know what to do to get the partial wafer out... otherwise in need of a redlight.

Comment p5000etch SNF 2007-12-07 13:31:57: Ch C Online

It's been re-enabled.
Ekin

Problem p5000etch SNF 2007-12-07 12:03:51: Ch.C is offline

Re: Comment p5000etch SNF 2007-12-04 15:34:08: Update

Re: Shutdown p5000etch SNF 2007-12-06 12:18:45: Wafer stuck in chamber C

chamber i/o did opened, adjusted door speed(open)
and recovered wafer from chamber.

Shutdown p5000etch SNF 2007-12-06 12:18:45: Wafer stuck in chamber C

I was etching 4 wafers in chamber C. 2 wafers etched without problem, but the third wafer did not come out of Chamber C. I got an error message "Cannot close I/O slit valve, blade may be in it." The blade is not stuck in the slit so it must be another problem. I tried to "Home all robot axes" but it could not recover the 3rd wafer.

Re: Comment p5000etch SNF 2007-12-04 00:24:38: cleared the wafer

Re: Comment p5000etch SNF 2007-11-27 07:56:20: Ch.C down for high He leak rate

Re: Comment p5000etch SNF 2007-12-05 19:18:40: Update Ch.B pressure problem

Re: Problem p5000etch SNF 2007-12-05 17:58:57: chamber B pressure down

Solenoid got disconnected. connected solenoid power
and tested pressure @100.200 and 250.

Comment p5000etch SNF 2007-12-05 19:18:40: Update Ch.B pressure problem

Manometer's pneumatic isolation valve is not opening. The air line that actuates the valve is not pressurizing. Need to troubleshoot further.

Problem p5000etch SNF 2007-12-05 17:58:57: chamber B pressure down

Chamber B pressure doesn't reach the setpoint 250 mTorr and is stuck at around 20 mTorr.

Re: Shutdown p5000etch SNF 2007-11-30 17:40:05: Wafer stuck while unloading

Repaired broken wire on ribbon for rotation/extension
and replaced bad solenoid for i/o door (open) imtermittenly
does not close. Also, repaired broken wire for chamber
C slit door not open sensor. Chamber is is shutdown
missing 24v , 2amp fuse on chamber interface module
is opened, i will change it tommorow.

Problem p5000etch SNF 2007-12-05 12:44:14:

Found chamber A offline this morning and half atm interlock
is on, don't know what happen and no comment on coral.
will need to troubleshoot after we fix the robot and i/o door
problem.

Re: Problem p5000etch SNF 2007-11-30 15:51:41: Chamber B He Leak Rate Too High

Replaced pin lip seal. Ran 8 wafers with no chamber problem.

Comment p5000etch SNF 2007-12-04 15:34:08: Update

The bottom line is the that the system is runable with maintenance assistance.
Ch.B- Replaced pin lip seals. Now leak rate is less than 0.5 sccm. Ran 8 wafers with no chamber problems.
Loadlock I/O door- The pneumatic cylinders that actuate the i/O door works intermittently but will need to be replaced. The door opens fine but most of the time , it fails when it tries to close. The door can be pushed close and the system will continue to run until it needs to close again when it goes into standby.
We will order new pneumatic cylinders tomorrow but in the mean time, the system can only be run with maintenance assistance because of the inherent danger of closing the I/O door manually.

Comment p5000etch SNF 2007-12-04 00:24:38: cleared the wafer

I unloaded the stuck wafer. Tried to run some wafers through, but got a few (recoverable) errors:
1). I/O slit valve is sticking- get an error, but it eventually closes on its own.
2). Robot extension position unknown.

Shutdown p5000etch SNF 2007-11-30 17:40:05: Wafer stuck while unloading

1 wafer (looks like on robot arm) stuck inside while unloading.
Stop procedure followed:
Failed @ abort loader step with the following error message:
CY525 318, software 12217 on robot rotation axis after 50ms.

Problem p5000etch SNF 2007-11-30 15:51:41: Chamber B He Leak Rate Too High

Etching wafers in chamber B results in He leak rate too high error 10 sec into main etch. Resuming recipe allows it to complete, but wafers look like they have overheated on one side.

Re: Problem p5000etch SNF 2007-11-29 10:56:36: Robot axis problem again.

Re: Problem p5000etch SNF 2007-11-29 13:27:30: I/O slit valve taking too long to close

Adjusted 1/o door speed.

Re: Shutdown p5000etch SNF 2007-11-29 13:45:55: wafer lost inside

System error lost wafer, but system is not showing any
wafer on any of the chambers. Vented chamber B and
found wafer on chuck, removed wafer and put chamber back
under vacuum.

Shutdown p5000etch SNF 2007-11-29 13:45:55: wafer lost inside

error positioning wafer in chamber B. sourced for move to handler and didn't error, but then sourced to move to cassete and there's no wafer. think it's still in the chamber, but creating wafer and moving it didn't work.

Problem p5000etch SNF 2007-11-29 13:27:30: I/O slit valve taking too long to close

keeps giving error, but eventually closes (about 15-20 seconds after alarm)

Problem p5000etch SNF 2007-11-29 10:56:36: Robot axis problem again.

I have to run the procedure for recover from stop every run for chamber. c. I did not have this problem when I used chamber b.

Re: Comment p5000etch SNF 2007-10-12 14:21:10: Ch A and C needs process qual

done

Re: Comment p5000etch SNF 2007-10-12 14:58:07: Qual'd CH A- good to use

done

Re: Problem p5000etch SNF 2007-11-28 15:14:05: problem with unloading the wafer

Re-teach zero position and home robot.

Problem p5000etch SNF 2007-11-28 15:14:05: problem with unloading the wafer

It gives an error, and I have to apply the "recover from stop procedure" every time I unload a wafer

Re: Problem p5000etch SNF 2007-11-20 16:54:16: pressure fluctuation

Re: Problem p5000etch SNF 2007-11-25 13:13:30: Cooling helium leak too high

Vented chamber and found broken wafer inside, vacuum
wafer chips and also chahged both large and small
lip seal. checked wafer handoff and rotation was off by
2 count.

Comment p5000etch SNF 2007-11-27 07:56:20: Ch.C down for high He leak rate

He leak rate was about 29 sccm when I ran a dummy wafer.

Re: Problem p5000etch SNF 2007-11-23 12:40:11: chamber B offline

Chamber B is now online.

Re: Problem p5000etch SNF 2007-11-26 18:47:20: Endpoint detection

Reset the endpoint detector computer

Re: Problem p5000etch SNF 2007-11-26 19:00:01: Ch. C offline

Placed Ch.C online.

Problem p5000etch SNF 2007-11-26 19:00:01: Ch. C offline

Problem p5000etch SNF 2007-11-26 18:47:20: Endpoint detection

endpoint detection computer is frozen

Problem p5000etch SNF 2007-11-25 13:13:30: Cooling helium leak too high

According to chamber C monitor,
cooling helium leak is too high, about 20sccm.
Process stopped.

Problem p5000etch SNF 2007-11-23 12:40:11: chamber B offline

I found that chmber B was offline.

Problem p5000etch SNF 2007-11-20 16:54:16: pressure fluctuation

pressure was fluctuating largely and the system stopped etching twice with a red alarm message that pressure was 280 instead of 250. chamber B, recipe Oxide was used.

Re: Comment p5000etch SNF 2007-11-01 14:13:13: ch.c. rf power high

Re: Comment p5000etch SNF 2007-11-19 07:42:01: HBR problem.

Re: Problem p5000etch SNF 2007-11-19 07:39:23: HBR problem, excess flow sensor error.

Ray, got the excess flow sensor to reset. HBR is back
online.

Comment p5000etch SNF 2007-11-19 07:42:01: HBR problem.

Do not use chamber C, problem with the HBR panel
(excess flow sensor error)

Problem p5000etch SNF 2007-11-19 07:39:23: HBR problem, excess flow sensor error.

Comment p5000etch SNF 2007-11-01 14:13:13: ch.c. rf power high

The popwer reading(~380) appears higher than specified(350)

Re: Problem p5000etch SNF 2007-10-29 09:43:16: Ch. C is still offline for handling problem

Adjusted extension wafer drop and pick.

Re: Problem p5000etch SNF 2007-10-29 12:52:58: CH A Metal recipe stopped with RF fault detected in step 2

Run a standard metal recipe w/o problem.

Problem p5000etch SNF 2007-10-29 12:52:58: CH A Metal recipe stopped with RF fault detected in step 2

Problem p5000etch SNF 2007-10-29 09:43:16: Ch. C is still offline for handling problem

Still troubleshooting the handling problem.

Re: Comment p5000etch SNF 2007-10-25 11:20:54: Update on bad pump

Load lock pump has been replaced. Also replaced the purge valve.

Re: Comment p5000etch SNF 2007-10-26 14:52:13: Update

Cesar replaced the load lock purge valve.

Re: Problem p5000etch SNF 2007-10-19 14:25:07: Wafer stuck in Ch.C

Re: Shutdown p5000etch SNF 2007-10-23 08:07:47: Bad load lock pump

Changed foreline purge nupro valve and set l/l purge
to 35mt.

Comment p5000etch SNF 2007-10-26 14:52:13: Update

Load lock pump has been installed. Now having a problem with the pump ballast valve. Unable to set the flow rate. Flow goes to maximum.

Comment p5000etch SNF 2007-10-25 11:20:54: Update on bad pump

Load lock pump is currently being repaired. Should be here by tomorrow.

Shutdown p5000etch SNF 2007-10-23 08:07:47: Bad load lock pump

Load lock circuit breaker trips. Need to replace the pump.