Re: the shutdown and "wafer did not drop on blade" errors, when I was running 25 wafers last night I noticed that when the robot arm grabs or deposits a wafer in the casette, it jostles the casette and moves the wafers forward slightly. if there are too many wafers in the casette, they are eventually so far foward that they don't load or unload properly. I recommend either running only 1-2 wafers at a time, or else manually pulling the wafers back during the process.
I suspect something is wrong with the robot arm -- it may be off-center or miscalibrated.
Subscribe to:
Post Comments (Atom)
No comments:
Post a Comment