Ran 4 etches of 120 sec each using Jim-Ox successfully. (Two wafers, two 120 sec etches each.) Note: I changed the De-clamp step from 5sec back to 15sec. (I am assuming 15 sec is the desired norm.)
5th wafer appears to be on the blade ok after etching but is not being sensed. Please unload wafer into box. ( I have left the tool enabled since there is a wafer inside. )
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