Pyramid texture etching

Does anyone have any experience doing a pyramid texture etch on Si
wafers? I'm having trouble getting separated, well defined pyramids.
Any input on concentrations and experimental set ups would be much
appreciated. Thanks so much.

Mark

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Mark Dante
Scientist/Project Manager
ThinSilicon Corp.
1400 N Shoreline Blvd, Suite B-3
Mountain View, CA 94043
Office: 650-937-0004
Fax: 650-937-0005