Saturday, April 14, 2012
Problem p5000etch SNF 2012-04-14 00:30:45: Chamber C slit valve did not open in maximum allowed time
After completing the Ch.C cleaning process with dummy wafer, the error message is appeared, and transfer process is stopped "between chamber C and elevator". My wafer is inside. If any of you can solve the issue, please put the wafer into my box. Thanks,
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