Does anybody have any experience wet etching TiO2 thin films? I tried 20:1 and 6:1 BOE today on TiO2 films ranging from 15-40 nm deposited by ALD with no luck. Oh and also we use PR as an etch mask, so it would be preferable if the etchant was at least somewhat selective against resist.
Any help is greatly appreciated.
Thanks,
Neil Dasgupta
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