Problem p5000etch SNF 2011-08-04 10:36:13: Poly Etch Turned Wafer Black

I did a poly etch in chamber C yesterday, which turned my wafer black. I had done the same etch before many times, with no problems. I am clearing several microns of resist from the wafer, and there is no photo resist. The wafer changed color after 200 seconds or so. Nancy suggested that the chamber needs a thorough "wet" clean.