We have learned that there will be another shutdown to the steam system
that heats this building to complete the tie-in to the new Nano Center.
They will plan to shutdown the system starting this Friday, February 12
at 10 p.m. They expect to have service restored by early Monday
morning, February 15 ... and may get things back up late in the day on
Sunday, February 14.
We have met with both the Superintendent of the Nano Center construction
team and with the head of the Stanford Steam Shop. They understand how
critical temperature control is to our operation and have assured us
that they will do everything possible to minimize the downtime and that
our building will be the first to be returned to service.
As many of you recall from last time, it is likely to get quite cold in
the lab. Over and above our personal discomfort, we expect that the
areas that are most likely to be affected will include the ebeam
lithography tools, resist coat, and wet etch operations in room
temperature baths (BOE and 50:1 HF, in particular). It is my
understanding (subject to correction by more knowledgeable sources) that
the ASML tool should not be affected as long as its environmental
chamber can keep the tool at temperature.
We apologize for this outage and any inconvenience that it causes. Let
us know if you have any questions or concerns related to this steam outage.
Thank you for your continued support,
John
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