Thursday, February 4, 2010
Comment p5000etch SNF 2010-02-04 14:38:10: Poly etch rate
Poly etch nonuniformity was reported. Elmer found the chiller temperature to be off and corrected it. Poly etch rate test was done. Average etch rate is 3467 A/min and nonuniformity was 3.0%. This is pretty normal. Plans are at some point in the near future to re-test at the wrong chiller temperature to confirm.
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