Supported on Microball Bearings
Nima Ghalichechian, Ph.D.
Senior Principal MEMS Engineer, FormFactor Inc.
Tuesday, Feb 2, 2010
Allen 101X 4:00–5:00pm
Abstract:
The design, fabrication, and characterization of a rotary micromotor
supported on microball bearings developed at the University of Maryland
will be presented. This has been the first demonstration of a rotary
micromachine with a robust mechanical support provided by
microball-bearing technology. One key challenge in the realization of a
reliable micromachine is the development of a bearing that would result
in high stability, low friction, and high resistance to wear. A
six-phase, rotary, bottom-drive, variable-capacitance micromotor is
designed, simulated, and fabricated on silicon using benzocyclobutene
low-k dielectric films. A characterization methodology is developed to
measure and extract the angular displacement, velocity, acceleration,
torque, mechanical power, coefficient of friction, and frictional force
through non-contact techniques. A top angular velocity of 517 rpm
corresponding to the linear tip velocity of 324 mm/s is measured.
Measurement of the transient response of the rotor indicated that the
torque is 5.62+/-0.5 micro N-m. Such a rotary micromotor can be used in
developing micropumps which are highly demanded microsystems for fuel
delivery, drug delivery, cooling, and vacuum applications. Examples of
successful applications of this work will be presented.
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