Adjusted the wafer pin lift position sensor and flag. Found the flag moved at a slight angle so that the sensor was tripped two times. This caused the handler to see two "at lifft" signals. The first signal, allowed the arm to move prematurely. Cycled the 16 wafers with no problems.
Also slowed down the movement of the lift pin when it moved from the release to the lift position.
Subscribe to:
Post Comments (Atom)
No comments:
Post a Comment