Problem p5000etch SNF 2010-02-20 12:29:59: MFC 3 (CF4 gas) low flow fault

Tried running dummy wafer using Jim-Ox recipe. During set-up step (Step 1) received alarm: "MFC 3 low flow fault - set pt 60 actual 31"
I tried repeating the setup step 3 times using the chamber command and etch time measured CF4 rapidly reached 31-32sccm but did not go any higher.