Etch rate Poly (POLYEMIT) = 3181A/min
ER PR = 627A/min
Etch rate Ox = 545A/min
ER Single Crystal Si = 2482A/min
Selectivity Poly : PR = 5.1 : 1
Sel Poly : Ox = 5.8 : 1
Sel Poly : Si = 1.3 : 1
Note; after wet clean
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