Friday, October 23, 2009

Comment p5000etch SNF 2009-10-23 16:08:45: CH A Etch Rate Qual

Etch rate Al/Si = 7333A/min
ER PR = 3398A/min
Etch rate Ox = 1240A/min
ER Single crystal Si = 3424
Selectivity Al/Si : PR = 2.2 : 1
Sel Al/Si : Ox = 6.0 : 1
Sel Al/Si : Si = 2.1 : 1
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