Friday, October 2, 2009

Comment p5000etch SNF 2009-10-02 17:02:33: Etch rate check CH A

Etch rate Al/Si = 7320A/min
ER PR = 3224A/min
Etch rate Ox = 1306A/min
Selectivity Poly : PR = 2.3 : 1
Sel Poly : Ox = 5.6 : 1
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