Friday, October 2, 2009

Comment p5000etch SNF 2009-10-02 16:50:29: Etch rate check CH.C

Etch rate Poly (POLYEMIT) = 2819A/min
ER PR = 559A/min
Etch rate Ox = 447A/min
Selectivity Poly : PR = 5 : 1
Sel Poly : Ox = 6.3 : 1
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