skip to main
|
skip to sidebar
P5000 Email Log
Monday, October 6, 2008
Re: Shutdown p5000etch SNF 2008-10-06 08:54:21: Working on Ch.C
Found the LL door bounced several times as it opens. Adjusted the LL door opening speed. Cycled 10 wafers with no problems. Will test again tomorrow.
No comments:
Post a Comment
Newer Post
Older Post
Home
View mobile version
Subscribe to:
Post Comments (Atom)
Problem Categories
vacuum pump
Ch.C
handling
rf power
Ch. A
load lock
Blog Archive
►
2013
(60)
►
February
(23)
►
January
(37)
►
2012
(802)
►
December
(55)
►
November
(78)
►
October
(58)
►
September
(49)
►
August
(98)
►
July
(44)
►
June
(70)
►
May
(75)
►
April
(84)
►
March
(97)
►
February
(74)
►
January
(20)
►
2011
(810)
►
December
(77)
►
November
(74)
►
October
(105)
►
September
(30)
►
August
(82)
►
July
(36)
►
June
(35)
►
May
(100)
►
April
(52)
►
March
(75)
►
February
(82)
►
January
(62)
►
2010
(900)
►
December
(38)
►
November
(48)
►
October
(58)
►
September
(88)
►
August
(53)
►
July
(83)
►
June
(69)
►
May
(108)
►
April
(111)
►
March
(100)
►
February
(96)
►
January
(48)
►
2009
(843)
►
December
(71)
►
November
(110)
►
October
(77)
►
September
(56)
►
August
(43)
►
July
(73)
►
June
(85)
►
May
(70)
►
April
(54)
►
March
(48)
►
February
(90)
►
January
(66)
▼
2008
(1009)
►
December
(33)
►
November
(60)
▼
October
(101)
Shutdown p5000etch SNF 2008-10-31 21:33:07: i/o ha...
Problem p5000etch SNF 2008-10-31 17:37:25: Wafer i...
Comment p5000etch SNF 2008-10-31 15:27:35: Ran a f...
Re: Problem p5000etch SNF 2008-10-28 15:10:15: waf...
Re: Shutdown p5000etch SNF 2008-10-31 09:04:48: Ch...
Comment p5000etch SNF 2008-10-31 14:40:50: Ch.B ha...
Shutdown p5000etch SNF 2008-10-31 09:04:48: Ch.B h...
Re: Problem p5000etch SNF 2008-10-30 18:04:34: Waf...
Problem p5000etch SNF 2008-10-30 18:04:34: Wafer L...
"Cleantamination"
Re: Problem p5000etch SNF 2008-10-30 00:42:21: ano...
Problem p5000etch SNF 2008-10-30 00:42:21: another...
missing lab notebook
Problem p5000etch SNF 2008-10-29 14:11:56: Ch C RF...
E342 MEMS Seminar: Bright low-power displays usin...
MEMS Packaging Presentation, Monday, 11/3/08, 11 a...
Problem p5000etch SNF 2008-10-28 15:10:15: wafer c...
Maskmaking Clinic - Today, 3 pm, CIS 101
Coral update ....
Reminder - University Ph.D. Oral Examination - Ale...
New SNF website: Call for Beta testers!
Maskmaking Clinic, Tuesday, 10/28, 3 pm
Notice of Equipment Reservations for Video Shoot
Re: Problem p5000etch SNF 2008-10-23 20:32:56: bla...
Re: Comment p5000etch SNF 2008-10-23 14:26:42: Ch....
Reminder: Labmembers' Mtg and Cleanliness/Contami...
SNF Coral and WebSite outage next Tuesday morning ...
Problem p5000etch SNF 2008-10-23 20:32:56: blade m...
Comment p5000etch SNF 2008-10-23 14:26:42: Ch.B is...
Re: Problem p5000etch SNF 2008-10-23 13:06:36: waf...
Problem p5000etch SNF 2008-10-23 13:06:36: wafer s...
PQuest User Survey
Raman spectroscopy available?
E342 MEMS Seminar: Monday Oct. 27th 3-4pm in CISX-...
MaN adhesion
Re: Potential issue with YES oven
Re: Comment p5000etch SNF 2008-10-20 10:20:09: Mai...
Re: Comment p5000etch SNF 2008-10-21 07:57:36: NF3...
Comment p5000etch SNF 2008-10-21 07:57:36: NF3 is ...
Re: Problem p5000etch SNF 2008-10-21 01:31:36: WAF...
Adobe Reader on the Sunrays ...
Problem p5000etch SNF 2008-10-21 01:31:36: WAFER S...
metal delamination during lift-off?
University Ph.D. Oral Examination - Alex R. Guicha...
OSA/SPIE Seminar: Jon Roth / Aesthera - Thurs. 10/...
Comment p5000etch SNF 2008-10-20 10:20:09: Mainten...
Cleanliness & Contamination Working Group: Meetin...
Labmembers' Meeting, Friday, Oct. 24, 1 pm, CISX A...
Process Clinic, 2-4 pm Monday
Re: Problem p5000etch SNF 2008-10-10 14:35:09: ch ...
Re: Comment p5000etch SNF 2008-10-13 11:25:03: Ch....
Re: Comment p5000etch SNF 2008-10-15 11:26:41: Ch....
Fine Al or Au bonding wire
Comment p5000etch SNF 2008-10-15 11:26:41: Ch.A pa...
Comment p5000etch SNF 2008-10-14 22:33:04: Chamber A
Bionanoparticle Characterization Workshop, Tuesday...
Comment p5000etch SNF 2008-10-13 11:25:03: Ch.A do...
SiO2/PR selectivity in MRC
Re: Problem p5000etch SNF 2008-10-12 07:11:59: end...
Problem p5000etch SNF 2008-10-12 07:11:59: endpoin...
ITO deposition
Problem p5000etch SNF 2008-10-10 14:35:09: ch a pa...
Re: Comment p5000etch SNF 2008-09-24 19:03:20: Upd...
Comment p5000etch SNF 2008-10-10 14:09:25: CH B qual
Re: Comment p5000etch SNF 2008-09-23 14:24:20: CH ...
Re: Problem p5000etch SNF 2008-09-24 10:29:43: ch....
Re: Comment p5000etch SNF 2008-09-23 14:18:48: tes...
Re: Problem p5000etch SNF 2008-09-24 14:28:52: CH ...
Re: Problem p5000etch SNF 2008-10-09 19:07:09: hel...
Problem p5000etch SNF 2008-10-10 12:18:36: disk fu...
Problem p5000etch SNF 2008-10-09 19:07:09: helium ...
E342 MEMS Seminar; Zero to Millions: High Volume M...
Comment p5000etch SNF 2008-10-08 17:33:55: CH C Qu...
Re: Problem p5000etch SNF 2008-10-03 11:39:46: CH ...
Re: Comment p5000etch SNF 2008-10-08 10:20:39: Upd...
Re: Comment p5000etch SNF 2008-09-22 11:35:10: Upd...
Postdoctoral Opportunity at the University of Mary...
Comment p5000etch SNF 2008-10-08 10:20:39: Update ...
Re: Problem p5000etch SNF 2008-10-02 23:00:49: bla...
Comment p5000etch SNF 2008-10-07 20:02:38: Wafer t...
Re: Problem p5000etch SNF 2008-09-23 14:29:51: CH ...
Re: Comment p5000etch SNF 2008-10-03 14:53:17: Ch....
Re: Comment p5000etch SNF 2008-10-06 14:46:02: Upd...
Veeco AFM seminar Reminder
Extended Deadline for Papers/Abstracts: October 21...
Re: Reminder: Cleanliness & Contamination Meeting...
Seminar Today: Retro-Mechanical Era? From MEMS to ...
Re: Shutdown p5000etch SNF 2008-10-06 08:54:21: Wo...
Comment p5000etch SNF 2008-10-06 14:46:02: Update ...
Shutdown p5000etch SNF 2008-10-06 08:54:21: Workin...
Venture Clinic w/Shahin Farschi, Tues. 10/7, 3 pm
SNF Process Clinic, Monday, 10/6, 2-4 pm
Comment p5000etch SNF 2008-10-03 14:53:17: Ch.C is...
Re: Shutdown p5000etch SNF 2008-10-03 11:48:01: ro...
Shutdown p5000etch SNF 2008-10-03 11:48:01: robot ...
Problem p5000etch SNF 2008-10-03 11:39:46: CH C di...
Problem p5000etch SNF 2008-10-02 23:00:49: blade d...
Problem p5000etch SNF 2008-10-02 22:59:47: unable ...
Re: Shutdown p5000etch SNF 2008-10-02 11:31:53: Wo...
Shutdown p5000etch SNF 2008-10-02 11:31:53: Workin...
►
September
(126)
►
August
(57)
►
July
(98)
►
June
(80)
►
May
(134)
►
April
(89)
►
March
(79)
►
February
(101)
►
January
(51)
►
2007
(89)
►
December
(49)
►
November
(29)
►
October
(11)
No comments:
Post a Comment