Comment p5000etch SNF 2008-10-08 17:33:55: CH C Qual result after clamp replaced and RF cal'd

Ran two wafers-
Si etch rate = 2260A/min and 2270A/min
PR = 460A/min and 590A/min- used SPR220-3 and -7. PR etch rate for 3612 should be a bit less.