skip to main
|
skip to sidebar
P5000 Email Log
Thursday, October 23, 2008
Comment p5000etch SNF 2008-10-23 14:26:42: Ch.B is down
Ch. B is down for wafer handling. Wafer shifts in the paddle during the unload. Need to troubleshoot.
No comments:
Post a Comment
Newer Post
Older Post
Home
View mobile version
Subscribe to:
Post Comments (Atom)
Problem Categories
vacuum pump
Ch.C
handling
rf power
Ch. A
load lock
Blog Archive
►
2013
(60)
►
February
(23)
►
January
(37)
►
2012
(802)
►
December
(55)
►
November
(78)
►
October
(58)
►
September
(49)
►
August
(98)
►
July
(44)
►
June
(70)
►
May
(75)
►
April
(84)
►
March
(97)
►
February
(74)
►
January
(20)
►
2011
(810)
►
December
(77)
►
November
(74)
►
October
(105)
►
September
(30)
►
August
(82)
►
July
(36)
►
June
(35)
►
May
(100)
►
April
(52)
►
March
(75)
►
February
(82)
►
January
(62)
►
2010
(900)
►
December
(38)
►
November
(48)
►
October
(58)
►
September
(88)
►
August
(53)
►
July
(83)
►
June
(69)
►
May
(108)
►
April
(111)
►
March
(100)
►
February
(96)
►
January
(48)
►
2009
(843)
►
December
(71)
►
November
(110)
►
October
(77)
►
September
(56)
►
August
(43)
►
July
(73)
►
June
(85)
►
May
(70)
►
April
(54)
►
March
(48)
►
February
(90)
►
January
(66)
▼
2008
(1009)
►
December
(33)
►
November
(60)
▼
October
(101)
Shutdown p5000etch SNF 2008-10-31 21:33:07: i/o ha...
Problem p5000etch SNF 2008-10-31 17:37:25: Wafer i...
Comment p5000etch SNF 2008-10-31 15:27:35: Ran a f...
Re: Problem p5000etch SNF 2008-10-28 15:10:15: waf...
Re: Shutdown p5000etch SNF 2008-10-31 09:04:48: Ch...
Comment p5000etch SNF 2008-10-31 14:40:50: Ch.B ha...
Shutdown p5000etch SNF 2008-10-31 09:04:48: Ch.B h...
Re: Problem p5000etch SNF 2008-10-30 18:04:34: Waf...
Problem p5000etch SNF 2008-10-30 18:04:34: Wafer L...
"Cleantamination"
Re: Problem p5000etch SNF 2008-10-30 00:42:21: ano...
Problem p5000etch SNF 2008-10-30 00:42:21: another...
missing lab notebook
Problem p5000etch SNF 2008-10-29 14:11:56: Ch C RF...
E342 MEMS Seminar: Bright low-power displays usin...
MEMS Packaging Presentation, Monday, 11/3/08, 11 a...
Problem p5000etch SNF 2008-10-28 15:10:15: wafer c...
Maskmaking Clinic - Today, 3 pm, CIS 101
Coral update ....
Reminder - University Ph.D. Oral Examination - Ale...
New SNF website: Call for Beta testers!
Maskmaking Clinic, Tuesday, 10/28, 3 pm
Notice of Equipment Reservations for Video Shoot
Re: Problem p5000etch SNF 2008-10-23 20:32:56: bla...
Re: Comment p5000etch SNF 2008-10-23 14:26:42: Ch....
Reminder: Labmembers' Mtg and Cleanliness/Contami...
SNF Coral and WebSite outage next Tuesday morning ...
Problem p5000etch SNF 2008-10-23 20:32:56: blade m...
Comment p5000etch SNF 2008-10-23 14:26:42: Ch.B is...
Re: Problem p5000etch SNF 2008-10-23 13:06:36: waf...
Problem p5000etch SNF 2008-10-23 13:06:36: wafer s...
PQuest User Survey
Raman spectroscopy available?
E342 MEMS Seminar: Monday Oct. 27th 3-4pm in CISX-...
MaN adhesion
Re: Potential issue with YES oven
Re: Comment p5000etch SNF 2008-10-20 10:20:09: Mai...
Re: Comment p5000etch SNF 2008-10-21 07:57:36: NF3...
Comment p5000etch SNF 2008-10-21 07:57:36: NF3 is ...
Re: Problem p5000etch SNF 2008-10-21 01:31:36: WAF...
Adobe Reader on the Sunrays ...
Problem p5000etch SNF 2008-10-21 01:31:36: WAFER S...
metal delamination during lift-off?
University Ph.D. Oral Examination - Alex R. Guicha...
OSA/SPIE Seminar: Jon Roth / Aesthera - Thurs. 10/...
Comment p5000etch SNF 2008-10-20 10:20:09: Mainten...
Cleanliness & Contamination Working Group: Meetin...
Labmembers' Meeting, Friday, Oct. 24, 1 pm, CISX A...
Process Clinic, 2-4 pm Monday
Re: Problem p5000etch SNF 2008-10-10 14:35:09: ch ...
Re: Comment p5000etch SNF 2008-10-13 11:25:03: Ch....
Re: Comment p5000etch SNF 2008-10-15 11:26:41: Ch....
Fine Al or Au bonding wire
Comment p5000etch SNF 2008-10-15 11:26:41: Ch.A pa...
Comment p5000etch SNF 2008-10-14 22:33:04: Chamber A
Bionanoparticle Characterization Workshop, Tuesday...
Comment p5000etch SNF 2008-10-13 11:25:03: Ch.A do...
SiO2/PR selectivity in MRC
Re: Problem p5000etch SNF 2008-10-12 07:11:59: end...
Problem p5000etch SNF 2008-10-12 07:11:59: endpoin...
ITO deposition
Problem p5000etch SNF 2008-10-10 14:35:09: ch a pa...
Re: Comment p5000etch SNF 2008-09-24 19:03:20: Upd...
Comment p5000etch SNF 2008-10-10 14:09:25: CH B qual
Re: Comment p5000etch SNF 2008-09-23 14:24:20: CH ...
Re: Problem p5000etch SNF 2008-09-24 10:29:43: ch....
Re: Comment p5000etch SNF 2008-09-23 14:18:48: tes...
Re: Problem p5000etch SNF 2008-09-24 14:28:52: CH ...
Re: Problem p5000etch SNF 2008-10-09 19:07:09: hel...
Problem p5000etch SNF 2008-10-10 12:18:36: disk fu...
Problem p5000etch SNF 2008-10-09 19:07:09: helium ...
E342 MEMS Seminar; Zero to Millions: High Volume M...
Comment p5000etch SNF 2008-10-08 17:33:55: CH C Qu...
Re: Problem p5000etch SNF 2008-10-03 11:39:46: CH ...
Re: Comment p5000etch SNF 2008-10-08 10:20:39: Upd...
Re: Comment p5000etch SNF 2008-09-22 11:35:10: Upd...
Postdoctoral Opportunity at the University of Mary...
Comment p5000etch SNF 2008-10-08 10:20:39: Update ...
Re: Problem p5000etch SNF 2008-10-02 23:00:49: bla...
Comment p5000etch SNF 2008-10-07 20:02:38: Wafer t...
Re: Problem p5000etch SNF 2008-09-23 14:29:51: CH ...
Re: Comment p5000etch SNF 2008-10-03 14:53:17: Ch....
Re: Comment p5000etch SNF 2008-10-06 14:46:02: Upd...
Veeco AFM seminar Reminder
Extended Deadline for Papers/Abstracts: October 21...
Re: Reminder: Cleanliness & Contamination Meeting...
Seminar Today: Retro-Mechanical Era? From MEMS to ...
Re: Shutdown p5000etch SNF 2008-10-06 08:54:21: Wo...
Comment p5000etch SNF 2008-10-06 14:46:02: Update ...
Shutdown p5000etch SNF 2008-10-06 08:54:21: Workin...
Venture Clinic w/Shahin Farschi, Tues. 10/7, 3 pm
SNF Process Clinic, Monday, 10/6, 2-4 pm
Comment p5000etch SNF 2008-10-03 14:53:17: Ch.C is...
Re: Shutdown p5000etch SNF 2008-10-03 11:48:01: ro...
Shutdown p5000etch SNF 2008-10-03 11:48:01: robot ...
Problem p5000etch SNF 2008-10-03 11:39:46: CH C di...
Problem p5000etch SNF 2008-10-02 23:00:49: blade d...
Problem p5000etch SNF 2008-10-02 22:59:47: unable ...
Re: Shutdown p5000etch SNF 2008-10-02 11:31:53: Wo...
Shutdown p5000etch SNF 2008-10-02 11:31:53: Workin...
►
September
(126)
►
August
(57)
►
July
(98)
►
June
(80)
►
May
(134)
►
April
(89)
►
March
(79)
►
February
(101)
►
January
(51)
►
2007
(89)
►
December
(49)
►
November
(29)
►
October
(11)
No comments:
Post a Comment