Wednesday, October 29, 2008

Problem p5000etch SNF 2008-10-29 14:11:56: Ch C RF Power error

Recipe: Ch C POLY ETCH. The recipe gave an RF forward power error and stopped during the main etch step. The set point is 200 W and it dropped to 169.
Posted by at

No comments:

Post a Comment

Subscribe to: Post Comments (Atom)