Friday, October 3, 2008

Problem p5000etch SNF 2008-10-03 11:39:46: CH C did not pass qual

PR etch rate = 458A/min (ok)
Si etch rate = 2217A/min (about half of expected)
Surface is spotty.
Used CH C POLY ETCH
I'll run some Si and PR wafers through to further condition
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