Thursday, May 1, 2008

Comment p5000etch SNF 2008-05-01 12:36:43: Ch.C and Ch.A are down, Ch.B up

Ch.B is up, need to run process qual
Ch.C is down because of intermittent wafer extension faults when arm goes into the chamber. Replaced a robot cable but stil having intermittent errors. Will check if robot is physically hitting something .
Ch.A is still down for the lift sensor. Ordered new cables, no ETA yet. Field service will also come in tomorrow to further troubleshoot the problems.

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