Tuesday, May 13, 2008

Re: Problem p5000etch SNF 2008-05-12 16:17:44: Ch. B. Got 4 black ring marks on the back of my wafers

Heavy resist build-up on the platten. Cleaned the platten and replaced all the lip seal o-rings (4 small + 1 large). Helium backside leak is < 2 sccm.
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