Wednesday, May 28, 2008
Comment p5000etch SNF 2008-05-28 10:58:07: Update
Installed the clear lid on chamber A so that I can observe the wafer handling while its under vacuum. Noticed the wafer lift moved up a little faster in vacuum. Adjusted the lift speed. So far I have cycled 72 wafers with no problems. I will contiue to cycle wafers until 2 pm and release the system at 3 pm.
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