Problem p5000etch SNF 2008-05-09 17:10:58: Ch.B Problem

After finishing 4 wafers beatifully, Ch. B had RF fault, which might be due to the position of the wafer. When we tried to retrieve the wafer, the arm couldn't sense the wafer although the wafer was sitting on the arm. Nancy helped me get the wafer out so the machine now is free of wafer but the Ch. B is still showing "wait for the wafer out." Put into yellow light because experienced user might know how to clear it.