Monday, May 12, 2008
Re: Problem p5000etch SNF 2008-05-12 07:13:34: Wafer sitting inside loadlock chamber
The backside of the wafer inside the loadlock had a spot of thick resist (??). Wet cleaned the chamber and cycled wafers. Chamber kept faulting for backside helium flow. Reopened the chamber and replaced the lip seal. Leaving the chamber offline because I did not have time to test it.
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