Wednesday, April 30, 2008

Shutdown p5000etch SNF 2008-04-30 00:37:37: Wafer fell off blade in machine

Tried CH.B JIM.OX with 55 gauss. Failed with the usual magnet error.
Tried to return wafer to cassette, and wafer fell off the blade.
Also, blade gave "unknown robot axis position" errors.

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