Re: Etching of ITO

Depends on your sample's feature size, I guess. We are using HCL liquid
etching in our electrode array fabrication. The thickness of our ITO
film is 200 nm and it's usually gone in 8 minutes. Some overetch time
will be helpful.

Take care,
Sergei

Wanki Kim wrote:

> Hi all,
>
> I am trying to make an electrode using ITO.
> Could anyone please tell me the way how to etch ITO?
> Thanks.
>
> Best,
> Wanki
>
>