Broken wafer in Ch.B. Also heavy resist build-up in the chamber. Wet cleaned the chamber and adjusted the wafer hand-off position. Still having a problem with the current reading on one of the magnet's 3 power supply line. One of the current reading drops to "0" when the RF turns on. Continuing to troubleshoot.
Ch.A - ordered two new chamber interconnect cables to replace the ones that has signs of corrosion.
Ch.C- ran OK. cycled 10 wafers with no problems. Will continue to exercise the chamber tomorrow.
Located at least one source of the water leak. Will attempt to repair tomorrow.
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