Re: ITO deposition

Hi all,

Thank you for help.

If other members want to deposit ITO, following email thread would be useful.

Thanks again, lab members.

Boram

Han-Bo-Ram Lee, Ph.D
Bent Research Group
Department of Chemical Engineering
Stanford University

Mail : Rm 113, Stauffer III Bldg., 381 North South Mall, Stanford, CA 94305
Email : sixram[at]stanford.edu or sixram[at]gmail.com
WWW : bentgroup.stanford.edu/

On Tue, Feb 1, 2011 at 10:43 AM, Alex Butterwick <abutterwick@gmail.com> wrote:

Hi Boram,

I was wondering if you learned anything.  We are also interested in depositing ITO.  I know the Berkeley microfab lab has the capabilities and we've thought about doing it there.

Thanks for your help.

Best,

Alex

On Jan 26, 2011, at 4:54 PM, Han-Bo-Ram Lee wrote:

Hi all,

Is there anyone know about available ITO deposition by sputtering?

It's not matter that the chamber is in a lab or from company service.

Thanks in advance.

Boram

Han-Bo-Ram Lee, Ph.D
Bent Research Group
Department of Chemical Engineering
Stanford University

Mail : Rm 113, Stauffer III Bldg., 381 North South Mall, Stanford, CA 94305
Email : sixram[at]stanford.edu or sixram[at]gmail.com
WWW : bentgroup.stanford.edu/