Does anyone know of any reliable ion implantation companies that can do a heated (~200oC) implant of non-standard ions such as Si, S, and Te? I know Innovion and Coresystems are very good implant companies, however, for non-standard ions they add a $1000 set-up in addition to their $500/implant fee. In the past I have used Luxience for affordable implantation of these elements, but they do not offer heated implants.
Thank you very much in advance for your help.
Sincerely,
Jenny
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