The odor/smell is in the L100 aisle of the Litho area. Mainly in the trianle between the Yes Oven, ASML Stepper and Large Blue M oven. It does not appear to be a solvent or resist smell. It is like a burning smell. Checked all tools. None appear to be malfunctioning. Could not find source of smell. Notified SNF after hours cell phone and Stanford work control. Work control will contact appropriate people and investigate.
..Gary
----- Original Message -----
From: "SangMoo Jeong" <popomoo@stanford.edu>
To: labmembers@snf.stanford.edu
Sent: Saturday, May 29, 2010 8:57:44 AM
Subject: odor in litho area
Hi, labmembers.
I smelled a strange odor in the litho area, especially near YES oven
region. I have no idea where it comes from. Please be careful.
-- Sangmoo Jeong
Graduate student
Department of Electrical Engineering
Stanford University
Email: popomoo@gmail.com
Phone: 650-704-3295
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