Friday, May 21, 2010

Comment p5000etch SNF 2010-05-21 18:42:35: Ch. B DC bias and He leak look good

Ran 6 wafers, 3 blank LTO oxide coating, 3 LTO w/ resist. DC bias -335 +/- 15 sccm for blanks LTO wafers, -310 +/- 10 for resist coated. He leak < 0.5 sccm
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