Mary mentioned in her email that there is no steam generation at
this time and that the lab feels cold. As of 6:00 PM the temperature
near the SVG coaters was 63 degrees and the humidity was 61 %. You may
want to reconsider doing Litho tonight, until the temperature and
humidity are at optimal conditions. The temp and humidity will have an
affect on the photoresist and you may not get the results that you
expect. Please be very cautious and take this into consideration so
that you will not have to rework you wafers. There is a digital meter
on the rack next to the SVG coaters. Typically the temperature is 70
degrees and the humidity is around 42%. If steam generation does not
come back online, conditions may get worse as the outside conditions
change and the lab has no way to compensate.
.. Gary
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