Help needed for maskmaking

Dear lab members,

 

My name is Jaeho Lee and I’m working for Dr. Goodson in ME department.

I need to fabricate some simple aluminum structure on silicon wafers, which would be used for temperature measurement in ME131A labs. I recently joined SNF so I’m not familiar with this type of work and I currently have no senior members from our lab to help me on maskmaking.

 

I have the design in my mind. A mask should be designed in a fashion that four pad measurements could be performed with a micron thick interconnect. I just don’t know where to get started such as using a software for drawing and ordering it the vendor.

 

I’d greatly appreciate anyone’s help or comments.

Thanks

 

Jaeho Lee

MS Candidate

Mechaniical Engineering

Stanford University

650) 213-6263