Conditions update at 8:30pm Monday

Main lab
56F and 63% humidity

Litho
59F and 60% humidity

--- On Mon, 8/18/08, Gary J Sosa <gsosa@stanford.edu> wrote:

> From: Gary J Sosa <gsosa@stanford.edu>
> Subject: Litho Area Conditions
> To: "labmembers@snf.stanford.edu" <labmembers@snf.stanford.edu>
> Date: Monday, August 18, 2008, 6:23 PM
> Hi All....
>
> Mary mentioned in her email that there is no steam
> generation at
> this time and that the lab feels cold. As of 6:00 PM the
> temperature
> near the SVG coaters was 63 degrees and the humidity was 61
> %. You may
> want to reconsider doing Litho tonight, until the
> temperature and
> humidity are at optimal conditions. The temp and humidity
> will have an
> affect on the photoresist and you may not get the results
> that you
> expect. Please be very cautious and take this into
> consideration so
> that you will not have to rework you wafers. There is a
> digital meter
> on the rack next to the SVG coaters. Typically the
> temperature is 70
> degrees and the humidity is around 42%. If steam generation
> does not
> come back online, conditions may get worse as the outside
> conditions
> change and the lab has no way to compensate.
>
> .. Gary