Shutdown p5000etch SNF 2012-07-20 15:15:53: wafer stuck between elevator and cassette

Not sure if it has to do with the thickness of the wafer (360um DP), but my wafer was on its way out and it is just sitting on the wall in the gate between the elevator and the cassette. Screen gives the following error: "The load chamber task did not acknowledge the sequencer." I put out some clean sheets. Alternatively, wafer can be put into slot 1 of my cassette box. Thanks!