Etching nano-holes in metal?

Hey labmembers,

Has anyone etched nano grooves/holes/slit structures ~ 1um by 500nm in metal using any of the etching tools (MRC etcher etc. ) in SNF? I plan to pattern such small trenches in silver and then etch them using MRC etcher. It would be extremely useful to know if at all it is possible to etch metal from such small structures.

thanks,
--
~Vrinda

Vrinda Thareja
Ph.D. Candidate
Brongersma Group
Department of Materials Science and Engineering
Stanford University