Phosphorus Spin-on dopant

Dear labmembers,

 

Does anyone have phosphorus spin-on dopant (SOD) that we can share a little bit? 

 

Our lab already has one from Honeywell company, named P8545 with thickness of 2,045Å – 2,450Å. But we are looking for other types of SOD with different concentrations.  

 

If you happen to have any, could you please let me know? and I would appreciate it a lot!

 

Thanks,

Shuang Wang

--
Shuang Wang,
Department of Electrical Engineering,
Stanford University, CA, 94305
Tel: 650-862-6603