Tuesday, April 26, 2011
Problem p5000etch SNF 2011-04-26 10:45:12: Ch.A helium leak rate errors
Running process in Ch.A but getting helium leak rate errors over and over again even on blank wafers. Leak rate is hovering around 6sccm which appears to be the alarm limit. Restarting the recipe step usually gives a result just under 6sccm (sometimes after a few tries) so it is possible to get wafers through.
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