Does anyone have suggestions on improving SPR3612 resist adhesion to Ruthenium? I tried spinning the resist after HMDS prime in YES oven at the Laurell resist spinner (5500 rpm for 1um PR). None of the PR remained on most of the samples.
Thanks a lot,
Arunanshu
Friday, April 1, 2011
Poor resist adhesion to Ruthenium
Hi labmembers,
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