Comment p5000etch SNF 2010-12-04 23:12:27: oxide chamber EBR

Sorry, we did 2mm EBR instead of 5mm EBR, and it was too late to take them out when we discovered it. Ran 5 wafers. The tips of the clamps in the top left side of the wafer touched the resist, but the other clamps didn't. Really sorry.