Thursday, July 15, 2010

Comment p5000etch SNF 2010-07-15 15:26:37: Maintenance work

- Reset the Ch.B heat exchanger circuit breaker and adjusted the temperature
- Corrected Ch.C heat exchanger configuration
- Re-enabled the cap sensors
- Ran 4 wafers through Ch.C and 1 wafer through Ch.A with no problems

No comments: