this time a shorter update on the ald status in the snf.
quality circle: first meeting this friday at 10am in allen 101. note the location change compared to what was announced previously.
savannah: system now on coral. the documentation is finished as it currently stands. changes were: 1) corrected QC meeting location; 2) full, annoted list of ALD recipe commands; 3) standard recipes delineated and annotated; and 4) process monitoring data added. training is open for those interested. see the website (https://snf.stanford.edu/SNF/equipment/chemical-vapor-deposition/ald/savannah) for all pertinent information and provide any feedback you wish.
fiji1 and fiji2: as john shott astutely pointed out fiji1 and fiji2 were not easily differentiable, so instead we have fiji-l (left chamber when facing the load lock end of the system - this is the one with ozone and is currently slated as the clean chamber) and fiji-r (right chamber when facing the load lock end of the chamber). the chambers under fiji-l and fiji-r are on coral. those who have emailed me are on the training list. it is very helpful to know your desired materials and cleanliness level to plan accordingly. the system is still in permitting limbo and i hope to have further information soon regarding that status.
thank you and have a great day.
j
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